Angle Resolved XPS (ARXPS)

Angle-resolved XPS (ARXPS) is a technique that varies the emission angle at which the electrons are collected, therefore enabling electron detection from different depths. Unlike sputter depth profiling, ARXPS can provide non-destructive information about the thickness and composition of ultra-thin films.

We utilise a specialised tilt sample module for ARXPS measurements which can be used to investigate films that are too thin to be analysed via conventional sputter depth profiling or might be irretrievably damaged by sputtering such as polymers.