FEI Nova NanoSEM 450 FEGSEM
Instrument Manager: Dr Xi-Ya Fang
Instrument Location: G41
Description: A high resolution scanning electron microscope with in-lens detectors and advanced optics allowing high contrast imaging at low accelerating voltages. The microscope can operate in both high vacuum and low vacuum environments, enabling the imaging of insulating materials without the need for sample coating. This system is also fitted with a large area SDD x-ray detector allowing for fast x-ray mapping with large count rates.
Technical Configuration: FEG; 5-axis stage; IR chamber camera; oil-free pumping system; retractable CBS annular BSE detector; low vacuum imaging; LV-BSE detector (GAD); Helix detector; beam deceleration; in-lens detectors; NavCam; plasma cleaner; cryo-trap; Bruker Quantax 400 X-ray analysis system and 60mm2 SDD with super light element window (slew); Delmic SPARC Cathodoluminescence System; Deben EBIC amplifier; Kammrath Weiss Vacuum Transfer Module.