JEOL IT800 SHL FEGSEM
Instrument Manager: Dr Xi-Ya Fang
Instrument Location: G43
Description:
A versatile field emission SEM that offers high throughput analytical capability, high resolution imaging and excellent low voltage performance. The microscope will be equipped with the latest high-speed EDS & EBSD detectors for high throughput micro-analysis, as well as a high-sensitivity EDS detector offering ultimate spatial resolution EDS analysis at low voltages and high sensitivity for light elements detection. The microscope can operate in both high vacuum and low vacuum environments, enabling the imaging of insulating materials without the need for sample coating. In addition, it has a controlled atmosphere transfer solution capable of working with beam and air sensitive specimens.
Technical Configuration:
FEG; 5-axis stage; beam deceleration; hybrid specimen exchange chamber equipped with plasma cleaner and controlled atmosphere transfer accessories; super hybrid lens (SHL) with UED and UHD in-lens detectors; IR chamber camera; navigation camera; cryo-trap; oil-free pumping system; beam rocking ECP; retractable low vacuum system including a low vacuum BSE detector; ETD; retractable multisegment BSE detector; Deben CL detector; Oxford Instruments Ultim Max 170 mm2 EDS & Ultim Extreme windowless 100 mm2 EDS detectors; Oxford Instruments Symmetry S3 EBSD detector.