Tescan Clara/NewTec In-Situ FEGSEM

Instrument Manager: Dr Xi-Ya Fang
Instrument Location: G36
Description:
A dedicated and fully integrated in-situ heating and mechanical testing field emission SEM that enables fully automated and complex in-situ heating/loading experiments. The microscope will be equipped with a NewTec in-situ tensile stage MT1000 and FurnaSEM furnace for in-situ heating and straining experiments, and the latest high-speed EDS & EBSD detectors for simultaneous EDS and EBSD data acquisition during in-situ tests. The SEM, in-situ stage and EDS/EBSD systems are fully integrated and controlled by a single software, which enables highly complex loading and heating strategies. The microscope can operate in both high vacuum and low vacuum environments.
Technical Configuration:
FEG; 5-axis stage; plasma cleaner; IR chamber camera; oil-free pumping system; GIS Pt; low vacuum mode; low vacuum Gaseous SE detector; ETD; retractable LE-BSE scintillator-type detector; retractable LE-4Q BSE 4-quadrant solid-state detector; retractable water-cooled BSE detector; in-lens Axial detector; in-lens Multidetector; Oxford Instruments Ultim Max 170 mm2 EDS & Symmetry S3 EBSD detectors; Essence SharkSEM Advanced and Automate for scripting; tensile stage MT1000 up to 10 kN loading; FurnaSEM up to 1200°C; cooling device down to -160°C; ex-situ chamber equipped with an optical microscope and a pumping device.