Thermo Scientific Verios 5 UC FEGSEM
Instrument Manager: Dr Xi-Ya Fang
Instrument Location: G42
Description: A top-of-the-range, ultrahigh resolution FEG-SEM, including excellent low voltage performance.
Resolution better than 1nm at beam landing energy above 1 keV, and 1nm at 500V, with a landing energy range of 20 eV to 30 keV. It has a range of in-lens detectors providing extra imaging contrast mechanisms, an EDX detector and a Python-based application programming interface.
Technical Configuration: FEG; Elstar electron column with UC+ technology; beam deceleration; specimen quick loader; 5-axis stage; oil-free pumping system; IR chamber camera; in-chamber navigation camera; plasma cleaner; cryo-trap; beam rocking ECP; ETD; in-lens TLD; in-column ICD and Mirror detectors; Oxford Instruments AZtec X-ray analysis system and 80mm2 SDD; retractable CBS/DBS BSE detector; retractable STEM 3+ detector.