Thermo Scientific Verios 5 UC FEGSEM

Thermo Scientific Verios 5 UC FEGSEM

Instrument Manager: Dr Xi-Ya Fang

Instrument Location: G42

Description: A top-of-the-range, ultrahigh resolution FEG-SEM, including excellent low voltage performance.
Resolution better than 1nm at beam landing energy above 1 keV, and 1nm at 500V, with a landing energy range of 20 eV to 30 keV. It has a range of in-lens detectors providing extra imaging contrast mechanisms, an EDX detector and a Python-based application programming interface.

Technical Configuration: TBA