FEI Quanta 3D FEGSEM
Instrument Manager: Dr Yang Liu
Instrument Location: G26
Description: A versatile dual beam system with a Ga ion beam for patterning and milling and electron beam for imaging and analysis. The ion beam may be used to prepare cross-sections, lamellae for transmission electron microscopy and pattern micron-sized prototypes and devices. The microscope can operate in high and low vacuum and environmental modes with a cold stage, enabling the imaging of insulating materials and frozen aqueous specimens. This system is also fitted with a large area SDD x-ray detector and EBSD system allowing for fast x-ray mapping and crystallographic scans. The XuM module permits tomography on a micron scale.
Technical Configuration: FEG; Ga FIB; Pt GIS; 5-axis; stage; IR chamber camera; oil-free pumping system; retractable 4-quadrant BSE detector; low vacuum imaging; LV-BSE detector; E-BSE detector; Retractable STEM detector; EDAX Pegasus and TEAM X-ray analysis system and 10mm2 SDD with ultra-thin window (UTW); TSL Hikari EBSD system; Kleindiek in-situ and ex-situ lift-out; FEI AutoFIB Application; FEI AutoTEM G2 Application; FEI AutoSlice and View Application; Gatan X-ray ultraMicroscope (XuM) with microtomography stage; Deben peltier coolstage.